StudyQA — Master: Micro and Nano Systems — Chemnitz University of Technology

Micro and Nano Systems

Study mode:On campus Study type:Full-time Languages: English
Deadline: Jul 15, 2023
StudyQA ranking:1339 Duration:2 years

Photos of university / #tuchemnitz

This English-language Master's programme covers a wide range of subjects with focus on future challenges in the fields of micro and nano systems.
The courses provide world-class, future-oriented education in design, manufacturing, characterisation and integration of miniaturised components into engineering systems. The interdisciplinary courses cover fundamental theoretical knowledge in physics and engineering but also application-oriented skills in developing innovative products, in business administration and management. Courses and practical training address current and prospective needs of industrial and academic research.

The programme's target audience consists of:
  • Students with a BSc in Electrical Engineering or Information Technology from Technische Universität Chemnitz
  • International and German students holding at least a Bachelor's degree in an equivalent academic field who wish to deepen and specialise their knowledge before entering industry or academia

Educational organisation

Compulsory (obligatory) modules:
  • Microsystems design (semester 1, lect/sem/ lab)
  • Micro and nano devices (semester 1, lect/sem/ lab)
  • Smart sensor systems (semester 1, lect/sem/ lab)
  • Materials in micro and nanotechnologies (semester 1, lect/sem)
  • Reliability of micro- and nanosystems (semester 1 & 2, lect/sem)
  • Technologies for micro and nano systems (semester 1 & 2, lect/sem)
  • Design of heterogeneous systems (semester 2, lect/sem/lab)
  • Semiconductor physics/nano structures (semester 2, lect/sem)
  • Advanced integrated circuit technology (semester 2, lect/sem)

Elective (optional) modules
Students must elect modules from the following catalogue in order to earn 20 credits:
  • Design for testability for circuits and systems (semester 1, lect/sem) - 2cr
  • Automotive sensor systems (semester 2, lect/sem) - 5cr
  • Integrated circuit design - transistor level (semester 2, lect/sem/lab) - 5cr
  • Fields and waves (semester 2, lect/sem) - 3cr
  • Microscopy and analysis on the nano scale (semester 2, lect/sem) - 5cr
  • Micro optical systems (semester 2, lect/sem) - 3cr
  • Self organising networks (semester 2, lect) - 2cr
  • Network security (semester 2, lect) - 2cr
  • Power semiconductor devices (semester 3, lect/sem) - 5cr
  • Optoelectronic devices (semester 3, lect) - 3cr
  • Surfaces, thin films and interfaces (semester 3, lect/sem) - 3cr

Research Project (obligatory, at the university) - semester 3

Master's Thesis (obligatory, at the university) - semester 4

Forms of assessment

For each module (subject) either by written or by oral exam
Details can be found in the module descriptions, which are a part of the study regulations. The exam must be passed in order for credit points to be awarded.

Language requirements

  • IELTS from 5.0
  • TOEFL internet based: min. 87 points
  • TOEFL paper based: min. 500 points
  • TOEFL computer based: min. 173 points
  • Cambridge: from First Certificate in English
  • TOEIC: 785-944 points
  • Confirmation of (undergraduate) lessons in English
  • Studies of English language
  • Translator

A2 (CEFR),
  • A1 (CEFR) at the time of application (condition for regular admission and enrolment)
  • A2 (CEFR) latest by the end of the third semester
(CEFR: Common European Framework of Reference for Languages)

Academic requirements

  • Bachelor's degree in Electrical Engineering (Bachelorstudiengang Elektrotechnik) or Bachelor's degree in Information and Communication Technology (Bachelorstudiengang Informations- und Kommunikationstechnik) from Technische Universität Chemnitz/Faculty of Electrical Engineering and Communication Technology (Technische Universität Chemnitz/Fakultät für Elektrotechnik und Informationstechnik)
  • Equivalent degree (check by board of examiners)

Enrolment fees

All students have to pay a semester contribution of approx. 250 EUR.
This fee also covers the semester ticket, which permits you to use buses and trams in Chemnitz during the semester. International students will receive a blank bank transfer form with which to transfer the semester contribution. However, the fee can also be paid after arrival in Chemnitz via German bank card or bank transfer.

Costs of living

Approx. 680 EUR per month to cover personal expenses

Arrival support

The Orientation Week usually takes place in the first week of the semester. During this week, the International Office offers a number of activities such as an information session on all questions related to studying at Technische Universität Chemnitz, a library and campus tour, visits to the media centre of the language centre as well as to the computer labs. Participation in the Orientation Week is free of charge.

Services and support for international students

The Buddy Student Programme at Technische Universität Chemnitz, organised by the International Office, will help you to get in contact with German students and scholars. The members organise several events during the semester and give practical tips for studying and living in Chemnitz.


The Student Union Chemnitz-Zwickau runs several student residences. International students can apply for a single room or for a bed in a double room in one of the residences. The prices depend on the furnishings of the room and vary between 150 EUR and 280 EUR.
More information at:
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Study mode:On campus Languages: English
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201–250 place StudyQA ranking: 1200