Microsystems Engineering

Study mode:On campus Study type:Full-time Languages: English
Deadline: May 1, 2026
83 place StudyQA ranking:6234 Duration:2 years

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The Master's degree programme in Microsystems Engineering at the University of Freiburg offers a comprehensive and interdisciplinary education designed to equip students with the advanced knowledge and practical skills necessary to innovate and excel in the field of microsystems technology. This programme combines principles from electrical engineering, mechanical engineering, material sciences, and computer science to provide a holistic understanding of the design, fabrication, and application of microsystems. Students will explore the development of microelectromechanical systems (MEMS), microsensors, actuators, and other integrated microsystems that are pivotal in modern technology sectors such as medicine, automotive, industrial automation, consumer electronics, and environmental monitoring.

Throughout the programme, students benefit from a balanced mix of theoretical coursework, laboratory work, and project-based learning. The curriculum covers essential topics including microfabrication techniques, integrated circuit design, materials for microsystems, signal processing, and system integration. Special attention is given to innovation and entrepreneurship, preparing graduates to contribute effectively to research and development projects, start-ups, or established technology firms. The programme also emphasizes practical experience through collaborations with industry partners, internships, and access to state-of-the-art laboratories at the university. This ensures that graduates develop not only technical expertise but also project management and teamwork skills vital for success in their careers.

The interdisciplinary approach facilitates a deep understanding of how to design and manufacture advanced microsystems tailored for specific applications, with an emphasis on sustainability and environmental impact. Additionally, students have the opportunity to engage in cutting-edge research under the guidance of renowned faculty members recognized internationally for their work in microsystems technology. The degree prepares students for diverse career paths in research, development, and innovation within the rapidly evolving field of microsystems engineering.

Upon graduation, students will be equipped to work in academia, industry, or entrepreneurial ventures, contributing to technological advancements that influence everyday life and address global challenges. The programme’s international orientation and collaboration with industry provide students with valuable global perspectives and professional networks. With a flexible structure that allows specialization in options such as sensors, actuators, microfabrication, or system integration, the Master's in Microsystems Engineering aims to cultivate highly skilled graduates ready to shape the future of microsystems technology.

Educational organisation

The first year of the programme is very demanding. According to the recommended study plan, the MSE students complete the following foundation courses:
  • Microelectronics
  • Micro-mechanics
  • Micro-optics
  • Biomedical microsystems
  • Micro-actuators
  • Micro-fluidics
  • Sensors
  • MSE Technology and Processes
  • Assembly and Packaging
  • Dynamics of MEMS
  • Signal Processing
To give the students some hands-on experience in the first year, the MST design laboratory is a two-semester module in which small teams of students undertake a comprehensive design project in microsystems engineering. Requiring students to address all aspects of the generation of a microsystem, from conceptualisation through project planning to fabrication and testing, this module provides an essential glimpse into the workings of engineering projects.

In the second year, elective courses will be chosen from two of the following sub-disciplines:
  • Circuits and systems
  • Design and simulation
  • Life sciences: Biomedical engineering
  • Life sciences: Lab-on-a-chip
  • Materials
  • MEMS processing
  • Photonics
  • Sensors and actuators

In the last semester, each student works as a member of one of the 18 research groups at IMTEK, with full access to laboratory and cleanroom infrastructure to do their final project. The Master's thesis requires project planning, experimental work, theoretical analysis, and presentation of the results.
Module formats are: lectures, discussion sections, laboratory courses, thesis project.

Forms of assessment

Grading: each module may require exams - written or oral - problem sets, laboratory reports or presentations and will be awarded an ECTS grade.

Course objectives

After graduating from the Master's programme, the microsystems engineers will have gathered graduate-level knowledge in highly advanced microsystems in a broad spectrum of application areas, which will enable them either to start a career in industry or to pursue research work in a scientific environment.

Language requirements

The Master of Science programme in Microsystems Engineering is designed for German and international students and is taught in English. For non-native speakers of English, a TOEFL or IELTS score or Cambridge Certificate is required to assure sufficient knowledge of English to complete the programme.
The required scores are: TOEFL 580 (paper-based), 237 (computer-based), 92-93 (Internet-based), IELTS 6.5.
Whereas the existence of an internationally diverse community in the IMTEK implies that much interaction in the research groups and laboratories takes place in English, Master's students are encouraged to learn German in order to enable them to fully participate in the academic and social environment we offer.

Academic requirements

All applicants must have a Bachelor's degree in engineering or science with an excellent CGPA or final grade.
To apply for the Master of Science programme in Microsystems Engineering, please register to the online application portal on our website, enter your data, print the PDF form, and send it by mail along with the following documents:
  • a certified and (if necessary) translated copy (German or English) of your undergraduate diploma. If you have not yet completed your undergraduate studies, a certified transcript of records is sufficient
  • a certified and (if necessary) translated copy (German or English) of your grade transcript.
  • proof of English proficiency (TOEFL, IELTS or Cambridge Certificate)
  • GRE score (strongly recommended)
  • curriculum vitae or résumé
  • personal statement of intent
  • at least one recommendation letter from a university professor using the form on the course website
  • APS certificate (for Chinese and Vietnamese applicants only)
All documents submitted must be in English. All original documents that are not in English or German must be accompanied by a notarised English or German translation. Please note that only hard copy (paper) applications will be accepted; electronic or incomplete applications will not be considered.

Enrolment fees

Approx. 150 EUR per semester, including student fee, administration fee, and contribution to the student representation

Costs of living

Participants must make sure in good time that sufficient funds are available to finance their participation in a course of study. The average cost of living in Freiburg for one month is currently approx. 800-900 EUR. Some details:
  • Student accommodation costs approx. 280-450 EUR (monthly).
  • Private expenses amount to around 350 EUR (monthly).
  • Health insurance is available for approx. 45-90 EUR (monthly).
  • Transport: A special student fare for regional transport costs approx. 89 EUR (per semester).

Job opportunities

Outstanding students may easily find opportunities to work as a tutor or researcher in
one of the laboratories of the department.

Funding opportunities within the university

Each year, the Faculty of Engineering offers performance-based partial scholarships of 2,400 EUR per year and student to five of the best applicants for the Master's programmes.
http://www.tf.uni-freiburg.de/studies/services/financialaid/crs-en

Arrival support

Orientation week
The week before the beginning of the winter semester is dedicated to events which help new students find their way around the campus, the university and the city of Freiburg. The events also serve to introduce the students to each other, so that networking can begin early. Tutors accompany students to the immigration office and help them with all administrative matters. Guided tours of the campus and other important facilities are also offered.
Programme coordinator:
Once you have applied for the programme, the coordinator will get in touch with you to help you prepare for your stay in Germany, find accommodation, register at the university and answer your questions.
Mentoring:
Each student is assigned to a professor who acts as his personal mentor throughout the studies.

Services and support for international students

In addition to services and support offered by each coordinator of a course of study, the International Office organises a special four-day orientation session which generally takes place two weeks before the beginning of the semester. This orientation session includes information about various aspects of everyday life (e.g. accommodation, work opportunities, etc.), presentations and visits to important institutions (e.g. the university library), and opportunities for socialising with other international students. During the semester, the "International Club", coordinated by the Studentenwerk (students' social services), offers a great variety of events, trips, and services for international students in cooperation with the International Office. Furthermore, the UNIKOS team, a group of international students who have been studying at the University of Freiburg for some time, give practical advice and can be approached for help in several languages.

Accommodation

As Freiburg is an attractive city, finding a suitable place to live can take a little time. Only a small number of students can be offered a room in a student dormitory. The Studentenwerk (students' social services) is in charge of the student dormitories. Applicants must expect a waiting period. In addition to these dormitories, several independent dormitories are listed on the university website. The Studentenwerk also offers a list of available private rooms and the International Office can be contacted for further assistance in finding accommodation (http://www.international.uni-freiburg.de/wohnen-en).
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Study mode:On campus Languages: English
Local:$ 3.47 k / Year(s) Foreign:$ 3.47 k / Year(s)
Deadline: May 1, 2026 StudyQA ranking: 4698